"Design and Optimization of Sensitivity Enhancement Package for MEMS-Based ..."

Wenhan Chang et al. (2021)

> Home

Details and statistics

DOI: 10.3390/S21134337

access: open

type: Journal Article

metadata version: 2023-09-30

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/sensors/ChangYZYHG21
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/sensors/ChangYZYHG21
Wenhan Chang, Lingmeng Yang, Zhezheng Zhu, Zhenchuan Yang, Yilong Hao, Chengchen Gao:
Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor. Sensors 21(13): 4337 (2021)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.