"A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy."

Shuo Chen et al. (2023)

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DOI: 10.3390/S23031276

access: open

type: Journal Article

metadata version: 2023-09-30

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  - https://dblp.org/rec/journals/sensors/ChenFGJZPXHWW23
Shuo Chen, Liuhaodong Feng, Song Guo, Yucheng Ji, Shuwen Zeng, Xinlin Peng, Yang Xu, Tianbao Hu, Zhenyu Wu, Shinan Wang:
A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy. Sensors 23(3): 1276 (2023)

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