"Topologically Optimized Nano-Positioning Stage Integrating with a ..."

Tao Chen et al. (2017)

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DOI: 10.3390/S17020257

access: open

type: Journal Article

metadata version: 2025-09-11

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Tao Chen, Yaqiong Wang, Huicong Liu, Zhan Yang, Pengbo Wang, Lining Sun:
Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor. Sensors 17(2): 257 (2017)

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