"Squeeze Film Effect in Surface Micromachined Nano Ultrasonic Sensor for ..."

Avik Ghosh Dastidar et al. (2023)

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DOI: 10.3390/S23104665

access: open

type: Journal Article

metadata version: 2023-07-07

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Avik Ghosh Dastidar, Reshmi Maity, Ramesh Chandra Tiwari, Dejan Vidojevic, Tijana S. Kevkic, Vojkan Nikolic, Subhajit Das, Niladri Pratap Maity:
Squeeze Film Effect in Surface Micromachined Nano Ultrasonic Sensor for Different Diaphragm Displacement Profiles. Sensors 23(10): 4665 (2023)

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