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"A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at ..."

Savannah R. Eisner et al. (2021)

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DOI: 10.3390/S21010149

access: open

type: Journal Article

metadata version: 2022-10-02

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  - journals/sensors/EisnerCLYGS21
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  - https://dblp.org/rec/journals/sensors/EisnerCLYGS21
Savannah R. Eisner, Cailin A. Chapin, Ruochen Lu, Yansong Yang, Songbin Gong, Debbie G. Senesky:
A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air. Sensors 21(1): 149 (2021)

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