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"CMOS Compatible Hydrogen Sensor Using Platinum Gate and ALD-Aluminum Oxide."

Adham Elshaer et al. (2024)

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DOI: 10.3390/S24103020

access: open

type: Journal Article

metadata version: 2024-06-18

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Adham Elshaer, Serge Ecoffey, Abdelatif Jaouad, Stéphane Monfray, Dominique Drouin:
CMOS Compatible Hydrogen Sensor Using Platinum Gate and ALD-Aluminum Oxide. Sensors 24(10): 3020 (2024)

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