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"Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin ..."

Martin Fischeneder et al. (2018)

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DOI: 10.3390/S18113842

access: open

type: Journal Article

metadata version: 2022-04-19

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Martin Fischeneder, Martin Oposich, Michael Schneider, Ulrich Schmid:
Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films. Sensors 18(11): 3842 (2018)

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