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"Polyimide-On-Silicon 2D Piezoelectric Micromachined Ultrasound Transducer ..."
Sanjog Vilas Joshi, Sina Sadeghpour, Michael Kraft (2023)
- Sanjog Vilas Joshi
, Sina Sadeghpour
, Michael Kraft
:
Polyimide-On-Silicon 2D Piezoelectric Micromachined Ultrasound Transducer (PMUT) Array. Sensors 23(10): 4826 (2023)
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