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"Development of the Tele-Measurement of Plasma Uniformity via Surface Wave ..."
Si-Jun Kim et al. (2023)
- Si-Jun Kim
, Minsu Choi, Sang-Ho Lee, Won-nyoung Jeong, Young-Seok Lee
, In-Ho Seong
, Chul-Hee Cho
, Dae-Woong Kim, Shin-Jae You
:
Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density Uniformity in Plasma Display Fabrication Process. Sensors 23(5): 2521 (2023)
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