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"Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR ..."

Kihyun Kim et al. (2022)

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DOI: 10.3390/S22239490

access: open

type: Journal Article

metadata version: 2023-01-31

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Kihyun Kim, Yeonsu Lee, Ignacio Llamas-Garro, Jung-Mu Kim:
Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications. Sensors 22(23): 9490 (2022)

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