"Quality Factor Enhancement of Piezoelectric MEMS Resonator Using a Small ..."

Lixia Li et al. (2022)

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DOI: 10.3390/S22207751

access: open

type: Journal Article

metadata version: 2024-10-06

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Lixia Li, Chuang Zhu, Haixia Liu, Yan Li, Qi Wang, Kun Su:
Quality Factor Enhancement of Piezoelectric MEMS Resonator Using a Small Cross-Section Connection Phononic Crystal. Sensors 22(20): 7751 (2022)

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