"Design and Fabrication of a MEMS Flow Sensor and Its Application in ..."

Yaxin Liu, Liguo Chen, Lining Sun (2009)

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DOI: 10.3390/S90604138

access: open

type: Journal Article

metadata version: 2018-11-14

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Yaxin Liu, Liguo Chen, Lining Sun:
Design and Fabrication of a MEMS Flow Sensor and Its Application in Precise Liquid Dispensing. Sensors 9(6): 4138-4150 (2009)

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