"Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) ..."

Yonggyun Park et al. (2023)

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DOI: 10.3390/S23125563

access: open

type: Journal Article

metadata version: 2024-03-22

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Yonggyun Park, Pengzhan Liu, Seunghwan Lee, Jinill Cho, Eric Joo, Hyeong-U. Kim, Taesung Kim:
Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD. Sensors 23(12): 5563 (2023)

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