"Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed ..."

Juan Ren et al. (2016)

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DOI: 10.3390/S16020204

access: open

type: Journal Article

metadata version: 2018-11-14

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Juan Ren, Michael Ward, Peter Kinnell, Russell Craddock, Xueyong Wei:
Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures. Sensors 16(2): 204 (2016)

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