"Highly Sensitive Capacitive MEMS for Photoacoustic Gas Trace Detection."

Tarek Seoudi et al. (2023)

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DOI: 10.3390/S23063280

access: open

type: Journal Article

metadata version: 2023-04-29

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Tarek Seoudi, Julien Charensol, Wioletta Trzpil, Fanny Pages, Diba Ayache, Roman Rousseau, Aurore Vicet, Michael Bahriz:
Highly Sensitive Capacitive MEMS for Photoacoustic Gas Trace Detection. Sensors 23(6): 3280 (2023)

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