"An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS ..."

Johannes Stegner et al. (2018)

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DOI: 10.3390/S18072159

access: open

type: Journal Article

metadata version: 2021-10-16

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Johannes Stegner, Sebastian Gropp, Dmitry Podoskin, Uwe Stehr, Martin Hoffmann, Matthias A. Hein:
An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements. Sensors 18(7): 2159 (2018)

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