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"Enhancing Si3N4 Selectivity over SiO2 in Low-RF Power NF3-O2 Reactive Ion ..."
Nguyen Hoang Tung et al. (2024)
- Nguyen Hoang Tung
, Heesoo Lee, Duy Khoe Dinh, Dae-Woong Kim, Jin Young Lee
, Geon Woong Eom, Hyeong-U. Kim
, Woo Seok Kang:
Enhancing Si3N4 Selectivity over SiO2 in Low-RF Power NF3-O2 Reactive Ion Etching: The Effect of NO Surface Reaction. Sensors 24(10): 3089 (2024)
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