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"Low-Energy Ion Implantation and Deep-Mesa Si-Avalanche Photodiodes with ..."
Tiancai Wang et al. (2024)
- Tiancai Wang, Hongling Peng, Peng Cao, Qiandong Zhuang
, Jie Deng, Jian Chen, Wanhua Zheng:
Low-Energy Ion Implantation and Deep-Mesa Si-Avalanche Photodiodes with Improved Fabrication Process. Sensors 24(2): 640 (2024)

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