"A Temperature-Insensitive Resonant Pressure Micro Sensor Based on ..."

Pengcheng Yan et al. (2019)

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DOI: 10.3390/S19183866

access: open

type: Journal Article

metadata version: 2023-10-23

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Pengcheng Yan, Yulan Lu, Chao Xiang, Junbo Wang, Deyong Chen, Jian Chen:
A Temperature-Insensitive Resonant Pressure Micro Sensor Based on Silicon-on-Glass Vacuum Packaging. Sensors 19(18): 3866 (2019)

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