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"Mathematical Modeling of Electrostatic MEMS with Tailored Dielectric ..."

John A. Pelesko (2002)

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DOI: 10.1137/S0036139900381079

access: closed

type: Journal Article

metadata version: 2020-05-20

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John A. Pelesko:
Mathematical Modeling of Electrostatic MEMS with Tailored Dielectric Properties. SIAM J. Appl. Math. 62(3): 888-908 (2002)

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