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"A Variational Approach to the Inverse Photolithography Problem."

Luca Rondi, Fadil Santosa, Zhu Wang (2016)

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DOI: 10.1137/140991868

access: closed

type: Journal Article

metadata version: 2020-12-18

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  - https://dblp.org/rec/journals/siamam/RondiSW16
Luca Rondi, Fadil Santosa, Zhu Wang:
A Variational Approach to the Inverse Photolithography Problem. SIAM J. Appl. Math. 76(1): 110-137 (2016)

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