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"A Variational Approach to the Inverse Photolithography Problem."
Luca Rondi, Fadil Santosa, Zhu Wang (2016)
- Luca Rondi
, Fadil Santosa, Zhu Wang
:
A Variational Approach to the Inverse Photolithography Problem. SIAM J. Appl. Math. 76(1): 110-137 (2016)
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