"Behavioral modeling of a monolithically integrated three-axis capacitive ..."

Abid Iqbal, Shafaat A. Bazaz (2012)

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DOI: 10.1177/0037549711411355

access: closed

type: Journal Article

metadata version: 2020-06-08

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Abid Iqbal, Shafaat A. Bazaz:
Behavioral modeling of a monolithically integrated three-axis capacitive accelerometer based on the MetalMUMPs process. Simul. 88(5): 565-579 (2012)

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