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"Data-Driven Approach for Fault Detection and Diagnostic in Semiconductor ..."
Shu-Kai S. Fan et al. (2020)
- Shu-Kai S. Fan
, Chia-Yu Hsu
, Du-Ming Tsai
, Fei He
, Chun-Chung Cheng:
Data-Driven Approach for Fault Detection and Diagnostic in Semiconductor Manufacturing. IEEE Trans Autom. Sci. Eng. 17(4): 1925-1936 (2020)
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