"Large Pre-Trained Models and Few-Shot Fine-Tuning for Virtual Metrology: A ..."

Chin-Yi Lin et al. (2025)

> Home

Details and statistics

DOI: 10.1109/TASE.2025.3568010

access: closed

type: Journal Article

metadata version: 2025-06-11

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/tase/LinTET25
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/tase/LinTET25
Chin-Yi Lin, Tzu-Liang Tseng, Solayman Hossain Emon, Tsung-Han Tsai:
Large Pre-Trained Models and Few-Shot Fine-Tuning for Virtual Metrology: A Framework for Uncertainty-Driven Adaptive Process Control in Semiconductor Manufacturing. IEEE Trans Autom. Sci. Eng. 22: 15351-15370 (2025)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.