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"Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al ..."
Xianzong Xie et al. (2013)
- Xianzong Xie
, Loren Rieth
, Ryan Caldwell, Mohit Diwekar, Prashant Tathireddy, Rohit Sharma, Florian Solzbacher:
Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al $_{\bf 2}$O$_{\bf 3}$ and Parylene C for Biomedical Implantable Devices. IEEE Trans. Biomed. Eng. 60(10): 2943-2951 (2013)
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