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"Computer Simulation of Impurity Diffusion in Semiconductors by the Monte ..."

A. Akiyama et al. (1987)

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DOI: 10.1109/TCAD.1987.1270262

access: closed

type: Journal Article

metadata version: 2020-09-24

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A. Akiyama, T. Hosoi, I. Ishihara, S. Matsumoto, T. Niimi:
Computer Simulation of Impurity Diffusion in Semiconductors by the Monte Carlo Method. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 6(2): 185-189 (1987)

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