"Segment-based etch algorithm and modeling."

T. Thurgate (1991)

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DOI: 10.1109/43.85756

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type: Journal Article

metadata version: 2020-09-24

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T. Thurgate:
Segment-based etch algorithm and modeling. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 10(9): 1101-1109 (1991)

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