"Algorithms for simulation of three-dimensional etching."

Kenny K. H. Toh, Andrew R. Neureuther, Edward W. Scheckler (1994)

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DOI: 10.1109/43.277635

access: closed

type: Journal Article

metadata version: 2020-09-24

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Kenny K. H. Toh, Andrew R. Neureuther, Edward W. Scheckler:
Algorithms for simulation of three-dimensional etching. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 13(5): 616-624 (1994)

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