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"Analytical Models for Three-Dimensional Ion Implantation Profiles in FinFETs."

Liping Wang et al. (2013)

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DOI: 10.1109/TCAD.2013.2277975

access: closed

type: Journal Article

metadata version: 2020-09-24

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Liping Wang, Andrew R. Brown, Binjie Cheng, Asen Asenov:
Analytical Models for Three-Dimensional Ion Implantation Profiles in FinFETs. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 32(12): 2004-2008 (2013)

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