"Layout Decomposition Co-Optimization for Hybrid E-Beam and Multiple ..."

Yunfeng Yang et al. (2016)

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DOI: 10.1109/TCAD.2015.2512903

access: closed

type: Journal Article

metadata version: 2023-08-16

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Yunfeng Yang, Wai-Shing Luk, David Z. Pan, Hai Zhou, Changhao Yan, Dian Zhou, Xuan Zeng:
Layout Decomposition Co-Optimization for Hybrid E-Beam and Multiple Patterning Lithography. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 35(9): 1532-1545 (2016)

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