"Generalized Predictive Control of Temperature on an Atomic Layer ..."

Wenjie He et al. (2015)

> Home

Details and statistics

DOI: 10.1109/TCST.2015.2404898

access: closed

type: Journal Article

metadata version: 2022-11-17

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/tcst/HeZCCCSC15
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/tcst/HeZCCCSC15
Wenjie He, Hai-Tao Zhang, Zhiyong Chen, Bo Chu, Kun Cao, Bin Shan, Rong Chen:
Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor. IEEE Trans. Control. Syst. Technol. 23(6): 2408-2415 (2015)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.