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"Travel range extension of a MEMS electrostatic microactuator."
Damrongrit Piyabongkarn et al. (2005)
- Damrongrit Piyabongkarn, Yu Sun
, Rajesh Rajamani, A. Serdar Sezen, Bradley J. Nelson
:
Travel range extension of a MEMS electrostatic microactuator. IEEE Trans. Control. Syst. Technol. 13(1): 138-145 (2005)
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