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"Scheduling and Control of Startup Process for Single-Arm Cluster Tools ..."

Yan Qiao et al. (2017)

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DOI: 10.1109/TCST.2016.2598762

access: closed

type: Journal Article

metadata version: 2021-02-05

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Yan Qiao, MengChu Zhou, Naiqi Wu, Qinghua Zhu:
Scheduling and Control of Startup Process for Single-Arm Cluster Tools With Residency Time Constraints. IEEE Trans. Control. Syst. Technol. 25(4): 1243-1256 (2017)

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