"Reducing Cross-Coupling in a Compliant XY Nanopositioner for Fast and ..."

Yuen Kuan Yong, Kexiu Liu, S. O. Reza Moheimani (2010)

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DOI: 10.1109/TCST.2009.2033201

access: closed

type: Journal Article

metadata version: 2020-06-15

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Yuen Kuan Yong, Kexiu Liu, S. O. Reza Moheimani:
Reducing Cross-Coupling in a Compliant XY Nanopositioner for Fast and Accurate Raster Scanning. IEEE Trans. Control. Syst. Technol. 18(5): 1172-1179 (2010)

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