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"Printability Enhancement with Color Balancing for Multiple Patterning ..."

Kuan-Jung Chen, Shao-Yun Fang (2019)

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DOI: 10.1109/TETC.2017.2653399

access: closed

type: Journal Article

metadata version: 2020-05-15

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Kuan-Jung Chen, Shao-Yun Fang:
Printability Enhancement with Color Balancing for Multiple Patterning Lithography. IEEE Trans. Emerg. Top. Comput. 7(2): 244-252 (2019)

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