"Performance-Improved Design of N-PID Controlled Motion Systems With ..."

Marcel François Heertjes, Xander G. P. Schuurbiers, Henk Nijmeijer (2009)

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DOI: 10.1109/TIE.2009.2012420

access: closed

type: Journal Article

metadata version: 2020-05-22

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Marcel François Heertjes, Xander G. P. Schuurbiers, Henk Nijmeijer:
Performance-Improved Design of N-PID Controlled Motion Systems With Applications to Wafer Stages. IEEE Trans. Ind. Electron. 56(5): 1347-1355 (2009)

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