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"Dual-Loop Iterative Learning Control With Application to an Ultraprecision ..."
Min Li et al. (2022)
- Min Li
, Taotao Chen, Rong Cheng, Kaiming Yang
, Yu Zhu, Caohui Mao:
Dual-Loop Iterative Learning Control With Application to an Ultraprecision Wafer Stage. IEEE Trans. Ind. Electron. 69(11): 11590-11599 (2022)
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