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"An Integrated Model-Data-Based Zero-Phase Error Tracking Feedforward ..."
Min Li et al. (2017)
- Min Li
, Yu Zhu, Kaiming Yang, Chuxiong Hu
, Haihua Mu:
An Integrated Model-Data-Based Zero-Phase Error Tracking Feedforward Control Strategy With Application to an Ultraprecision Wafer Stage. IEEE Trans. Ind. Electron. 64(5): 4139-4149 (2017)
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