"Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order ..."

Fazhi Song et al. (2019)

> Home

Details and statistics

DOI: 10.1109/TIE.2018.2842756

access: closed

type: Journal Article

metadata version: 2025-01-19

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/tie/SongLXYZ19
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/tie/SongLXYZ19
Fazhi Song, Yang Liu, Jianxin Xu, Xiaofeng Yang, Qiao Zhu:
Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables. IEEE Trans. Ind. Electron. 66(4): 3106-3116 (2019)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.