"Development and Repetitive-Compensated PID Control of a Nanopositioning ..."

Hui Tang et al. (2018)

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DOI: 10.1109/TIE.2017.2758749

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type: Journal Article

metadata version: 2023-09-30

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Hui Tang, Jian Gao, Xin Chen, Kai-Ming Yu, Suet To, Yunbo He, Xun Chen, Zhaohe Zeng, Sifeng He, Chuangbin Chen, Yangmin Li:
Development and Repetitive-Compensated PID Control of a Nanopositioning Stage With Large-Stroke and Decoupling Property. IEEE Trans. Ind. Electron. 65(5): 3995-4005 (2018)

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