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"Development of a Digital-Convolution-Based Process Emulator for ..."
Hsiu-Ming Yeh, Kuo-Shen Chen (2009)
- Hsiu-Ming Yeh, Kuo-Shen Chen
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Development of a Digital-Convolution-Based Process Emulator for Three-Dimensional Microstructure Fabrication Using Electron-Beam Lithography. IEEE Trans. Ind. Electron. 56(4): 926-936 (2009)
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