"Scheduling of Dual-Arm Cluster Tools With Wafer Revisiting and Residency ..."

Yan Qiao, Naiqi Wu, MengChu Zhou (2014)

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DOI: 10.1109/TII.2013.2272702

access: closed

type: Journal Article

metadata version: 2020-05-21

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Yan Qiao, Naiqi Wu, MengChu Zhou:
Scheduling of Dual-Arm Cluster Tools With Wafer Revisiting and Residency Time Constraints. IEEE Trans. Ind. Informatics 10(1): 286-300 (2014)

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