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"The thin dielectric film capacitive displacement transducer to nanometer."

Franco Castelli (2001)

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DOI: 10.1109/19.903886

access: closed

type: Journal Article

metadata version: 2020-06-08

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Franco Castelli:
The thin dielectric film capacitive displacement transducer to nanometer. IEEE Trans. Instrum. Meas. 50(1): 106-110 (2001)

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