"Design and Fabrication of Hollow Mushroom-Like Cilia MEMS Vector Hydrophone."

Yanan Geng et al. (2023)

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DOI: 10.1109/TIM.2022.3224998

access: closed

type: Journal Article

metadata version: 2024-04-28

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Yanan Geng, Weirong Ren, Guojun Zhang, Peng Chen, Shan Zhu, Yifan Zhang, Yan Liu, Li Jia, Jie Zhang, Yansong Wang, Wendong Zhang:
Design and Fabrication of Hollow Mushroom-Like Cilia MEMS Vector Hydrophone. IEEE Trans. Instrum. Meas. 72: 1-8 (2023)

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