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"A silicon-etched probe for 3-D coordinate measurements with an uncertainty ..."

Han Haitjema, Wouter Pril, P. H. J. Schellekens (2001)

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DOI: 10.1109/19.982938

access: closed

type: Journal Article

metadata version: 2020-06-08

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Han Haitjema, Wouter Pril, P. H. J. Schellekens:
A silicon-etched probe for 3-D coordinate measurements with an uncertainty below 0.1 μm. IEEE Trans. Instrum. Meas. 50(6): 1519-1523 (2001)

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