"Development of a Vertically Configured MEMS Heat Flux Sensor."

Antti Immonen et al. (2021)

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DOI: 10.1109/TIM.2020.3034961

access: open

type: Journal Article

metadata version: 2023-07-27

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Antti Immonen, Saku Levikari, Feng Gao, Pertti Silventoinen, Mikko Kuisma:
Development of a Vertically Configured MEMS Heat Flux Sensor. IEEE Trans. Instrum. Meas. 70: 1-9 (2021)

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