"Imaging of an Electret Film Fabricated on a Micro-Machined Energy ..."

Kenta Nakazawa et al. (2022)

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DOI: 10.1109/TIM.2022.3151173

access: closed

type: Journal Article

metadata version: 2022-03-15

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Kenta Nakazawa, Kengo Fukazawa, Takeshi Uruma, Gen Hashiguchi, Futoshi Iwata:
Imaging of an Electret Film Fabricated on a Micro-Machined Energy Harvester by a Kelvin Probe Force Microscope. IEEE Trans. Instrum. Meas. 71: 1-7 (2022)

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