"Motion Control of Wafer Scanners in Lithography Systems: From Setpoint ..."

Fazhi Song et al. (2024)

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DOI: 10.1109/TIM.2024.3413202

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type: Journal Article

metadata version: 2024-10-22

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Fazhi Song, Yang Liu, Yue Dong, Xinkai Chen, Jiubin Tan:
Motion Control of Wafer Scanners in Lithography Systems: From Setpoint Generation to Multistage Coordination. IEEE Trans. Instrum. Meas. 73: 1-40 (2024)

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