"Liquid Tin Droplet Generator in Laser-Produced Plasma Extreme Ultraviolet ..."

Qin Sun et al. (2024)

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DOI: 10.1109/TIM.2024.3428621

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type: Journal Article

metadata version: 2024-08-22

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Qin Sun, Huiming Qi, Xinbing Wang, Duluo Zuo:
Liquid Tin Droplet Generator in Laser-Produced Plasma Extreme Ultraviolet Source: A Review. IEEE Trans. Instrum. Meas. 73: 1-14 (2024)

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