"Thickness Measurement Based on Eddy Current Sensor With Coaxial Double ..."

Chengxin Wang et al. (2022)

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DOI: 10.1109/TIM.2022.3204104

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type: Journal Article

metadata version: 2022-10-18

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Chengxin Wang, Tongqing Wang, Fangxin Tian, Xinchun Lu:
Thickness Measurement Based on Eddy Current Sensor With Coaxial Double Coil for Chemical Mechanical Polishing. IEEE Trans. Instrum. Meas. 71: 1-10 (2022)

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